![](/statics/img/blank.png)
FreeDATA
License: Free File size: N/A
Users Rating: 5.0/5 - 1 votes
Please wait ... Your download link is being verified for malicious content.
You'll be able to download in 5 seconds.
You'll be able to download in 5 seconds.
ABOUT FreeDATA
Microlithography data analysis package capable of fitting Bossung type data sets, also known as focus exposure matrices. Keywords: Lithography, Photolithography, Photoresist, Process Window, Critical Dimension, CD, Bossung, FEM