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freesecs

License: Free ‎File size: N/A
‎Users Rating: 5.0/5 - ‎4 ‎votes

ABOUT freesecs

FREESECS is an open-source project for SEMI SECS standards. The software is compiled with GNU autotools/GCC and runs on Linux OS. FREESECS includes HSMS-SS(SEMI E37.1), SECSII(SEMI E5), 300mm & Interface A (planned). See http://opensecs.sourceforge.n

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