FREESECS is an open-source project for SEMI SECS standards. The software is compiled with GNU autotools/GCC and runs on Linux OS. FREESECS includes HSMS-SS(SEMI E37.1), SECSII(SEMI E5), 300mm & Interface A (planned). See http://opensecs.sourceforge.n
VERSION HISTORY
- Version files posted on 2010-06-06
Several fixes and updates - Version N/A posted on 2010-06-06
Program Details
- Category: Network & Internet > Other
- Publisher: opensecs.sf.net
- License: Free
- Price: N/A
- Version: Array
- Platform: linux